Energy harvester called triboelectric nanogenerator that convert mechanical energy from an ambient environment to electrical energy has been growing topic of interest as promising means of generatring electrical power for mobile system applications and micro devices without using wiring from an external power source. After the first report in 2012 due to high accessibility from the ubiquitous characteristics of contact electrification. With the help of a simple configuration and high accessibility, lots of TENGs have been developed for various applications, such as biomechanical energy harvesters, micro devices, and optoelectronic devices. With the exception of functional characteristics, another topic of interest is improvement of electrical output performance of TENG. As the generation of the electrical output is dependent on the surface contact, the surface morphology of the contact layer of the TENG plays an important role in enhancing the electrical output performance. Another factor is the increase of the surface charge by applying external electric field called poling process. Due to the poling process, the surface charge of contact layer is enhanced, especially, as the ferroelectric material is subjected to the external electric field, the surface potential difference increases. However, the process of surface modification is expensive and complex and poling process is time-consuming task. To overcome the limitation, we introduced the developed process in combination with nano imprinting and poling process. The thermoplastic and ferroelectric polymer which is PVDF is suitable for the nano imprinting and poling process in terms of characteristics. By applying the external electric field during the nano imprinting, the surface modification and the enhancement of surface charge and surface potential difference can be obtained. Also the shorten of the process can obtain the feasibility of mass production. From the results, we believe the research suggests a developed process can be applicable in energy industry.